etching paper

基本解释

This paper designs an etching system with constant temperature for etching process in MEMS manufacture.
本文设计了一个恒温腐蚀系统，用于微机械加工制作中的腐蚀工艺。
Based on electrochemical etching principles, the paper fabricated the micrometer scale wire electrodes used in WEMM.
本文基于电化学腐蚀原理，制备微细电化学线切割加工中使用的微米尺度线电极。
A technique for the fabrication of silicon cone cathode array by using anisotropic and isotropic etching has been reported in this paper.
详细研究了利用硅的各向异性腐蚀、各向同性腐蚀制备硅锥阴极阵列的工艺。