electrostatic actuator

基本解释

The estimation circuit estimates the amount of a charge accumulated in the insulating film of the electrostatic actuator.
上述检测电路检测上述静电型致动器的上述绝缘膜中所积蓄的上述电荷量。
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The bias circuit changes, on the basis of the estimation result stored in the storage circuit, a drive voltage to drive the electrostatic actuator.
上述偏置电路根据上述存储电路存储的上述检测结果，使用于驱动上述静电型致动器的驱动电压变化。
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According to the calibration principle of electrostatic actuator and the mechanics of piezoelectric ceramic, this thesis developed auto-calibration method of hydrophone.
介绍了微执行器的驱动方式及各自的优缺点、静电梳齿结构的特点和应用以及静电梳齿结构的工作原理。