micro-hotplate

基本解释

This paper reports a CMOS compatible tungsten micro-hotplate.
本文设计了一种与标准CMOS工艺兼容的钨微热板。
In this paper, a monolithic thermal vacuum sensor based on a micro-hotplate(MHP)and operating under constant bias voltage conditions was designed.
设计了一种工作在恒电压模式的、微热板结构的单片集成电阻真空传感器芯片。
Aiming at the static and dynamic performance tests of the micro gas pressure sensor with micro-hotplate, an automatic control system were established, which could maintain steady vacuum degree.
针对微热板式微气压传感器的静态和动态性能测试，对传感器的真空测试环境进行了实时控制仿真。

微热板
The finite element method （FEM） is utilized to simulate the thermal characteristics of micro-hotplate and provide a theoretical guidance for optimizing the device’s structure.
用有限元方法对陶瓷微热板的热特性进行模拟,为器件结构的优化提供理论指导。
机械工程
微热板